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Research
Transparent conductive thin films
deposited by Atmospheric Pressure Plasma Jet (APPJ)
(i) Transparent conductive thin films
Transparent conductive thin films are widely used as electrodes in various optoelectronic devices such as liquid crystal displays (LCD), solar cells, light-emitting devices (LED), and flat panel displays.
 Alpha-stepMeasure the film thickness |  SEM photoMeasure the surface profile of film (2D) |  AFM photoMeasure the surface profile of film (3D) |
|---|---|---|
 GIXRDMeasure the crystalline properties of film |  XPSMeasure the elemental composition of film |  UV-VIS SpectrometerMeasure the transmittance of film |
(ii) NTU APPJ System
This research develops atmospheric pressure plasma jet technology for deposition of high quality and low-cost nanoscale transparent conductive films.
Advantages :
1. No vacuum chamber
2. No vacuum pump
3. Easy to maintain
4. High efficiency
NTU APPJ 製程示意圖
資料來源: 周東陞，噴射式大氣電漿鍍製鎵摻雜氧化鋅薄膜之性質研究及均勻度改善，2014
NTU APPJ 機台側視圖
資料來源 : 陳于壹, 噴射式大氣電漿系統之設計架設與多次沉積氧化鋅鎵薄膜性質之量測與模擬 , 2016
NTU APPJ 鍍膜腔體系統
資料來源 : 陳于壹, 噴射式大氣電漿系統之設計架設與多次沉積氧化鋅鎵薄膜性質之量測與模擬 , 2016
NTU APPJ 電力系統 , 供氣系統及加熱系統
資料來源 : 陳于壹, 噴射式大氣電漿系統之設計架設與多次沉積氧化鋅鎵薄膜性質之量測與模擬 , 2016
The more we do, the more we can do - William Hazlitt
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